High-Precision Positioning Control of Piezoelectric Inertial Driver Based on High-Voltage Sawtooth Wave and Segmented PID

In this paper, a high-voltage nanoscale motion platform based on high-voltage sawtooth wave driving force and hierarchical PID control has been realized. A closed-loop driving-detection-control link is composed of a high-voltage power amplifier module(150VDC), a high-resolution grating ruler(with an accuracy of up to 2 nm), and a high-speed ARM processor. At the same time, a multi-level self-tuning PID parameter adjustment algorithm and a multi-level high-voltage sawtooth wave attenuation method are adopted, which can automatically identify the positioning process and adjust the control parameters to reduce the oscillation degree, significantly improving the positioning accuracy and stability. Experimental verification shows that this system can achieve precise positioning at 10 nm, and the stable error it measures is less than or equal to ± one nanometer. This level has reached the international advanced level, providing strong scientific and technological support for the development of high-end precision instruments in China.