Modeling SH–BAW Coupling in Low-Cut TC-SAW Devices Using Multimode COM
Abstract
This paper adapts the multimode Coupling-of-Mode (COM) model for low-cut Temperature Compensated Surface Acoustic Wave (TC-SAW) devices. The study focuses on devices based on -2° YX-cut lithium niobate substrates with Cu electrodes covered by a silicon oxide film. The interactions between the main Shear-Horizontal (SH) mode, the Rayleigh mode, and bulk acoustic waves (BAWs) are analyzed. The adaptation aims to approximate the frequency behavior of multimode COM parameters to enhance model accuracy.
Fields of Study & Subjects
Acoustic Wave Resonator Technologies
Ultrasonics and Acoustic Wave Propagation
Ferroelectric and Piezoelectric Materials
Publication details
- Journal / source
- IEEE International Microwave Filter Workshop (IMFW)
- Pages
- 1–3
- Publication date
- 7 February 2026
- Language
- EN