Multi Frequency Effect in Reversed c-Axis Polarity AlSiN film

IEEE International Microwave Filter Workshop (IMFW) 2026

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Authors: Ilya Sushchikh, Sergey Mishin, Brice Ivira, John D. Larson
DOI: 10.1109/imfw64610.2026.11419065
Cited by: 0
References: 6

Abstract

For many applications, it is desired to grow AlN or other piezoelectric films in a reversed c-axis orientation to fabricate RSBARs (Reversed c-axis Series Bulk Acoustic Resonator) [1] or other acoustic devices with high coupling coefficient kt^2 & Quality Factor Q. An RSBAR has two piezo films, one with normal c-axis orientation (Type CP/N-polar), the second with reversed c-axis (Type CN/metal-polar).

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Metal and Thin Film Mechanics Ultrasonics and Acoustic Wave Propagation

Publication details

Journal / source
IEEE International Microwave Filter Workshop (IMFW)
Pages
1–3
Publication date
7 February 2026
Language
EN