Acoustic Response Characteristics of Optical Fiber EFPI Sensors with in-Stress Silicon-Based Diaphragms

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Authors: Xiaojun Chen, Da Zhang, Xue Tao Pan, Yingsong Huang, Fenghuan Hao, Shengchun Liu
Cited by: 1
References: 28

Fields of Study & Subjects

Advanced Fiber Optic Sensors Mechanical and Optical Resonators Advanced Sensor and Energy Harvesting Materials

Publication details

Journal / source
Journal of Lightwave Technology
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
44
Issue
8
Pages
3269–3279
Publication date
22 January 2026