Fabrication of Metallic Microcomponents by Microelectroforming Using Sandwich-Structured Silver-Polydimethylsiloxane Composite Molds

Journal of Microelectromechanical Systems 2026

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Authors: Bo Zhou, Bo Su, Jiesheng Han, Aijun Zhang, Junhu Meng

DOI: 10.1109/jmems.2026.3651450

Cited by: 1

References: 7

Fields of Study & Subjects

Nanofabrication and Lithography Techniques Electrodeposition and Electroless Coatings Advanced Machining and Optimization Techniques

References 7