Compact, Scan-Pattern-Switchable 2-D Piezoelectric MEMS Mirror With 1-D Addressable Scanning

Journal of Microelectromechanical Systems 2026 Open access

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Authors: Joonyoung Yu, Yi Zhu, Mayur Birla, Miki Lee, Yiwei Yang, Evgueni T. Filipov, Thomas D. Wang, Kenn Richard Oldham
DOI: 10.1109/jmems.2026.3652017
Cited by: 1
References: 49

Abstract

chip) achieve a total mechanical scan angle (MSA) of 112° in slow axis resonance, including 11° of addressable static scan angle, and a total MSA of 15° excited at 3 kHz in the fast axis. A bar and hinge simulation model is introduced that accurately captures nonlinear dynamics. These capabilities are suitable for high frame rates in either Lissajous or raster scan patterns in microendoscope form factors, while static scan angle in bending enables significant 1D addressability.

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Adaptive optics and wavefront sensing Piezoelectric Actuators and Control

Publication details

Journal / source
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
35
Issue
2
Pages
218–226
Publication date
21 January 2026
Language
EN