Ring-Shaped MEMS Shutter Array With Subfield Addressing for Interference Microscopy

We present an innovative optical device, referred to as ring shutter, consisting of 3648 Micro-Electro-Mechanical-Systems (MEMS) elements arranged in a ring-shaped configuration with an overall diameter of 18 mm, developed for tailored dynamic spatial light modulation. The novelty of this approach lies not only within the design—including the actuation mechanism of subfield addressing, but also in its targeted application in interference microscopy. This paper aims to report on the proof of concept, detailing a lab demonstrator’s design, fabrication methods, experimental characterization, and first application results in a comprehensive overview. Compared to other micro iris or spatial light modulator (SLM) technologies, the ring shutter offers programmable light modulation across radial and azimuthal segments, a spectrally flat and fast dynamic response ($\lt 75~\mu $s), adequate modulation contrast (up to > 25 dB), moderate minimum driving voltage (< 52 V), and a scalable fabrication process suitable for cost-effective mass production. [2025-0187]