Mechanical Modeling and Optimized Design of In-Plane Fabry–Perot Cavities for Polymer Swelling Sensing
Abstract
We report on the mechanical modeling and optimization of a polymer-functionalized in-plane Fabry-Perot interferometer (FPI) with a deformable silicon mirror for swelling-based sensing. An analytical model links polymer properties and cavity geometry to device mechanical sensitivity, identifying the mirror flexibility as the dominant factor. To further increase mechanical sensitivity, we introduce a new design consisting of a partitioned polymer microchannel. Simulations and fabricated devices confirm the models, showing up a twofold sensitivity gain. These results provide general design rules and experimental validation for mechanically enhanced polymer-based FPIs, advancing their use in integrated environmental and gas sensors.[2025-0255]
Fields of Study & Subjects
Advanced Sensor and Energy Harvesting Materials
Advanced Materials and Mechanics
Analytical Chemistry and Sensors
Publication details
- Journal / source
- Journal of Microelectromechanical Systems
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 35
- Issue
- 3
- Pages
- 475–482
- Publication date
- 16 April 2026
- Language
- EN