A MEMS Piezoresistive Micro-Pressure Sensor With Ultra-Low Nonlinearity Over a Wide Operating Temperature Range

Journal of Microelectromechanical Systems 2026

View at publisher
Authors: Pengfei Zhang, Chengyu Wang, Xiong Cheng, Zhikang Lan, Xiangkun Jiao, Zechun Dou, Jian Guo, Can Chen, Xiaobo Li, Weiping Li, Daying Sun, Xiaodong Huang
DOI: 10.1109/jmems.2026.3683203
Cited by: 1
References: 25

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Innovative Energy Harvesting Technologies

Publication details

Journal / source
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
35
Issue
3
Pages
504–511
Publication date
1 May 2026