Hybrid Electrostatic-Axial Force Tuning for Mode Matching in Piezo-MEMS Pitch or Roll Gyroscopes

Journal of Microelectromechanical Systems 2026

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Authors: Zhenxiang Qi, Jie Gu, Zhaoyang Zhai, Kunfeng Wang, Wuhao Yang, Xiaorui Bie, Yue Wang, Xudong Zou
DOI: 10.1109/jmems.2026.3686244
Cited by: 1
References: 24

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Innovative Energy Harvesting Technologies

Publication details

Journal / source
Journal of Microelectromechanical Systems
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
35
Issue
4
Pages
621–629
Publication date
14 May 2026