Irreversible Membrane Deformation and Other Defects in Silicon-on-Nothing Structures: Experimental Insights and Cavity Pressure Characterization

Journal of Microelectromechanical Systems 2026 Open access

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Authors: Zhengnan Tang, Andrea Vergara, Shuji Tanaka

DOI: 10.1109/jmems.2026.3687890

Cited by: 1

References: 31

Fields of Study & Subjects

Structural Analysis and Optimization Advanced MEMS and NEMS Technologies Space Satellite Systems and Control

References 31