Cryogenic RF MEMS Switch With Electronic Calibration Capability

IEEE Journal of Microwaves 2026 Open access

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Authors: Lafe Spietz, Chris Giovanniello, Brandon Takaki, Wei Ye, Beverly Boiko, Christian J. Long, Nathan E. Flowers-Jacobs, Adam J. Sirois, P. F. Hopkins, Samuel P. Benz, Dylan Williams
DOI: 10.1109/jmw.2025.3638273
Cited by: 1
References: 29

Abstract

We characterize a radio-frequency micro-electro-mechanical-systems single-pole-six-throw switch designed for cryogenic operation to 10 GHz from room temperature to millikelvin temperatures. The switch contains an internal electronic calibration capability suitable for performing multiport vector and large-signal network analysis at room temperature and cryogenic temperatures. We demonstrate two calibration types, the first designed for measuring the scattering parameters of microwave devices connectorized with 3.5 mm coaxial connectors and the second for measuring the scattering parameters of microwave devices connectorized with Sub-Miniature version A (SMA) connectors.

Fields of Study & Subjects

Superconducting and THz Device Technology Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators

Publication details

Journal / source
IEEE Journal of Microwaves
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
6
Issue
1
Pages
251–262
Publication date
1 January 2026