0.53-mΩ.cm 2 /592-V High Breakdown Voltage GaN-on-Sapphire Schottky Diodes Without Edge Termination
Abstract
In this letter, we report high-performance Pt/GaN quasi-vertical Schottky barrier diodes on sapphire substrate. With a 5 μm drift layer and a highly controlled fabrication process, the devices demonstrate an extremely low on-resistance of 0.53 mΩ.cm² while exhibiting a high breakdown voltage of 592 V. The devices achieve a state-of-the-art Baliga’s figure of merit of 0.66 GW.cm-2. The turn-on voltage is also notably low at 0.72 V. Remarkably, the high device performance reported in this work was achieved without the use of passivation or edge termination techniques, in clear contrast to other recent studies.
Fields of Study & Subjects
GaN-based semiconductor devices and materials
Silicon Carbide Semiconductor Technologies
Ga2O3 and related materials
Publication details
- Journal / source
- IEEE Electron Device Letters
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 47
- Issue
- 3
- Pages
- 462–465
- Publication date
- 12 January 2026
- Language
- EN