Crystalline IGO TFTs With High Reliability Under DRAM-Compatible 600 °C N 2 Thermal Budgets
Fields of Study & Subjects
Thin-Film Transistor Technologies
Transition Metal Oxide Nanomaterials
Advanced Sensor and Energy Harvesting Materials
Publication details
- Journal / source
- IEEE Electron Device Letters
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 47
- Issue
- 5
- Pages
- 925–928
- Publication date
- 19 March 2026