Development of Single-Chip Nanoacoustic Filter Banks for Ku-Band Applications

This work presents the design and development of nanoacoustic filter banks covering the Ku-band on a single substrate. The approach integrates two complementary piezoelectric MEMS technologies: Cross-Sectional Lamé Mode Resonators (CLMRs) and Solidly Mounted Bidimensional Mode Resonators (S2MRs). Both exploit 30 % Scandium-doped Aluminum Nitride (ScAlN), deposited on silicon for CLMRs and on silicon carbide for S2MRs, enabling strong electromechanical coupling and high Quality Factor ($Q$). This combination supports compact, multi-frequency RF filtering with enhanced power handling and reliable nanoscale fabrication, advancing nanoacoustic components further into the highfrequency regime.