Manufacturing Silicon-Nanowire Based Piezoresistive Force Sensors with Top-Down Stepwise Controllable Etching Process

IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2026

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Authors: Geer Teng, Junbo Guo, Ziming Yang, Xin Li, Xiaoying Li, Y. Hao, Weizheng Yuan, H.-C. Chang, Hemin Zhang
DOI: 10.1109/mems64181.2026.11419243
Cited by: 0
References: 13

Abstract

Reported giant piezoresistive effect of silicon nanowires (SiNWs) motivates research of SiNWs-based devices, particularly for inertial and force sensors, whose fabrication however remains a challenge. This paper reports a controllable manufacturing process to fabricate a force sensor utilizing$

Fields of Study & Subjects

Nanowire Synthesis and Applications Advanced MEMS and NEMS Technologies Advanced Sensor and Energy Harvesting Materials

Publication details

Journal / source
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
1159–1162
Publication date
25 January 2026
Language
EN