Silicon-Glass Hybrid Micro Gas Chromatography Columns with High-Aspect-Ratio

This work presents a breakthrough in fabrication of high-aspect-ratio micro gas chromatography ($\mu \text{GC}$) columns. Silicon-glass hybrid$\mu \text{GC}$columns were achieved for the first time through anodic bonding silicon microfluidic channels and glass microfluidic channels. The designed maximum aspect ratio of the$\mu \text{GC}$columns reaches to 18.3. The glass microfluidic channels were fabricated using thermal reflow technology, proving its feasibility in process high-aspect-ratio glass-based microstructures. The resulting$\mu \text{GC}$columns exhibit excellent separation performance, successfully resolving n-alkanes mixture (C5-C9) within 6.5 minutes. The column efficiency of the$\mu \text{GC}$columns with channel width of 50$\mu \mathrm{m}$is 1306 plates$/ \mathrm{m}$, confirming the effectiveness of the proposed silicon-glass hybrid structure for rapid separation.