Anti-Phase Enhanced PMUT Supercell with Optimized Acoustic Coupling Engineering for High-Q and High-SPL Ultrasonic Applications

Achieving high acoustic output from piezoelectric micromachined ultrasonic transducers (PMUTs) is critical for biomedical applications but remains challenging due to severe cross-talk effect in dense arrays. This work presents a method that exploits, rather than suppresses, such crosstalk effect by selectively exciting an array-level anti-phase resonant mode in a supercell to boost collective vibration. As a result, the proposed supercell demonstrated a measurement displacement sensitivity of 457.7 nm/V in water, which is approximately seven times that of a conventional densely arranged array. Furthermore, a 2.7 fold increase in output sound pressure compared to a conventional array of equal area is illustrated, together with a high quality-factor of 34.3. This work establishes a feasible route for boosting acoustic output via mutual radiation, offering a crucial design strategy for highperformance water-borne or in-tissue PMUTs.