An Ultra-Low-Power Mems-Based Quad-Beam Dual-Bridge Catalytic Combustion Gas Sensor for Hydrogen Detection

This work reports an ultra-low-power quad-beam catalytic combustion hydrogen sensor that achieves a minimum power consumption of 1.2 mW in pulse mode operation. Fabricated via MEMS technology, the device integrates two pairs of catalytic-reference bridges on four suspended beams, each incorporating an S -shaped microheater in a fully symmetric configuration. Such a design markedly suppresses thermally induced deformation during operation and concentrates heat within the active region, thereby achieving higher thermal efficiency under reduced power consumption. The dual symmetric bridges provide doubled differential output, effectively enlarging the absolute response at low concentrations and enhancing sensitivity. Consequently, the sensor enables hydrogen detection from low to high concentrations with ultra-low power consumption and outstanding linear sensitivity.