A Piezoelectric Micromirror with Large Scanning Angle Based on Single-Crystal PZT

This paper presents a piezoelectric micromirror capable of large 2-axis angular scanning by integrating Zshaped piezoelectric actuators composed of a$2.18 \mu ~\mathrm{m}$thick single-crystal PZT layer. The incorporation of singlecrystal PZT not only increases the responsivity of the micromirror but also significantly reduces the residual stresses. The fabricated device has a 3 mm-diameter mirror plate and achieves the maximum quasi-static optical scanning angles of$\pm 15.0^{\circ}$and$\pm 24.2^{\circ}$along its two orthogonal axes. The first two resonant frequencies are 242 Hz and 405 Hz, respectively. The radius of curvature of the mirror can reach up to 66 cm.