A Pressure and Temperature Bimodal Sensor Integrated on an Optical Fiber Surface by in Situ Cylindrical Projection Lithography for Potential Interventional Laser Therapy

This paper presents a pressure and temperature bimodal sensor integrated on an optical fiber by in situ cylindrical projection lithography (CPL) for potential interventional laser therapy. The pressure sensing unit was realized using a suspended-graphene array on the fiber surface, and the temperature sensing unit was the patterned platinum (Pt) thin film, which were both fabricated and integrated by in situ MEMS fabrication based on our previously developed CPL technology. The pressure and temperature sensing units exhibited excellent sensitivity of$1.29 \times 10^{-5} \text{mmHg}^{-1}$and$0.00172 /{ }^{\circ} \mathrm{C}$, respectively, providing a potential way for simultaneous in situ monitoring in interventional laser therapy.