Controlled Delamination and Anti-Withdrawal Design for Reliable In-Vivo Implantation of Ultra-Wide Flexible Neural Probs

We present a MEMS-fabricated ControlledDelamination and Anti-Withdrawal Flexible Probe (CDAWFP) specifically designed to address assembly and implantation challenges of ultra-wide$(\approx 280 \mu ~\mathrm{m})$flexible neural probes for in-vivo multi-shank distributed deployment. CDAWFP combines a segmented parylene film to create a strong-to-weak adhesion gradient enabling low-force, guided delamination, a gold-reinforced rim around the piercing hole to resist deformation and reduce needle-hole interlock, and barbed tips to improve tissue anchoring. Robot-assisted neural implantation experiments demonstrate a reduction of peak delamination force from 59.2 mN to 12.0 mN, delamination success rising to 91.6%, and retention success of 83.3% after optimization. These results indicate that the CDAWFP structural strategy substantially improves reliability and positional stability of ultra-wide, high-density flexible probes in robot-assisted implantation.