UV-Induced Ozone Enables Direct Patterning of Twodimensional Materials for Batch Fabrication of Heterojunction Gas Sensors

We report for the first time a method for patterning two-dimensional (2D) materials using UV-induced ozone, enabling batch production of high-performance graphene$\text{MoS}_{2}$heterojunction sensors for trace$\text{NO}_{2}$detection. T The proposed methodology achieves precise micronanoscale patterning control while maintaining exceptional material integrity. Through real-time modulation of etching parameters, the process ensures complete protection of underlying layers during sequential patterning steps. The fabricated devices exhibit remarkable sensing performance with a detection limit of 250 ppb and excellent selectivity toward$\text{NO}_{2}$. This method shows significant potential for the mass production of advanced sensors based on 2D materials.