No-Drift Mode-Matched Ring Gyroscope with On-Chip Stress and Temperature Calibration
Abstract
We present a closed-loop mode-matched ring gyroscope that achieves almost no-drift through temperature and on-chip stress calibration for 60° C temperature cycling, for the first time. The angle random walk (ARW) and long-term stability improve by a factor of 2 with mode-matching compared to the mode-split operation, and we demonstrate a peak-to-peak scale factor (SF) of 282 ppm and a zero rate output (ZRO) temperature stability of$10^{\circ} / \mathrm{h}$. While mode-matching improves the short-term ARW, stress calibration enables long-term ZRO and SF stability. The calibrated ZRO stability reaches$0.6^{\circ} / \mathrm{h}$without drift, even under 60° C temperature cycling.
Fields of Study & Subjects
Geophysics and Sensor Technology
Advanced MEMS and NEMS Technologies
Advanced Fiber Optic Sensors
Publication details
- Journal / source
- 2026 IEEE 39th International Conference on Micro Electro Mechanical Systems (MEMS)
- Publisher
- IEEE
- Pages
- 1135–1138
- Publication date
- 25 January 2026