High-Frequency Piezoelectric Mems Mirror Design and Adaptive Variable-Density Scanning Method

This paper proposes an innovative phase modulation strategy to overcome the limitation of fixed-density point clouds in conventional Lissajous scanning, supported by a custom-designed piezoelectric MEMS micromirror featuring a fast-axis resonant frequency as high as 10.770 kHz. Dynamic adaptive variable-density Region of Interest (ROI) scanning is achieved using a single resonant mirror, eliminating the common trade-off between global redundancy and the need for multiple mirrors. The scanning field is partitioned into a nine-grid configuration, within which any sub-region can be designated as an ROI. By modulating parameters across three distinct modes, variable-density scanning can be selectively achieved within any localized area of interest. Experimentally, up to 77.57 % increase in scanning density within the ROI are demonstrated, providing a significant advancement for high-precision MEMS LiDAR applications.