High Performance Mxenes-Based $\text{CoNiMnP}-\text{Ti}_{3} \text{AlC}_{2}$ Permanent Magnetic Film for Flexible Mems Devices

This paper reports a process for fabricating micro-scale permanent magnet thin films on flexible substrates through electro-deposition method under low-temperature conditions. By dispersing the MAX-phase material$\text{Ti}_{3} \text{AlC}_{2}$in the plating bath and applying an external magnetic field during deposition, we synthesize a$\text{CoNiMnP}-\text{Ti}_{3} \text{AlC}_{2}$composite film. The film shows a 69.3 % increase in coercivity (75.72 Oe) and a 71.6 % improvement in maximum magnetic energy density per unit thickness relative to conventional CoNiMnP films. These enhanced magnetic properties, together with process compatibility and scalability, make the$\text{CoNiMnP}-\text{Ti}_{3} \text{AlC}_{2}$film a promising candidate for flexible magnetic MEMS with high performance and versatility.