Glass Reflow Integrated Hybrid Neural Probe with a Multishank Architecture for Optical and Electrical Stimulation

This paper presents a glass reflow-integrated hybrid neural probe that enables electrical stimulation and recording while incorporating embedded glass optical waveguides within a compact four-shank structure. Each shank contains a thermally reflowed glass waveguide formed in silicon, along with patterned metallic electrodes. The glass based configuration enhances mechanical rigidity and fabrication stability compared to polymer based probes. The fabricated device exhibits smooth sidewalls, uniform geometry, and reliable electrode connectivity. Additionally, the electrochemical characteristics were evaluated through cyclic voltammetry (CV), and insertion tests conducted in agarose gel verified the mechanical strength and insertion stability. These results support the feasibility of the glass waveguide-embedded hybrid neural probe for multimodal neural interfacing.