8×8 Large-Aperture Micromirror Array with High Fill Factor and 3-DOF Quasi-Static Driving

This paper reports an$8 \times 8$micromirror array with quasi-static 3-DOF continuous actuation, high fill factor, and large effective optical aperture. Composed of a doublelayer structure, the array adopts a CMOS-compatible fabrication method. The design utilizes octagonal mirror shape for large-array bonding while enables postdeposition of the array's reflective layer. 256 upper electrodes are routed optimized paths, with each pad assigned a unique addressing code. Finally, the fabricated array achieves electrical connection through a custom Printed Circuit Board and flexible flat cable, and completes packaging using an aluminum alloy cover plate and substrate to ensure structural stability.