A Method for Preparing Low-Noise Solid-State Nanopole via Controlled Dielectric Breakdown
Abstract
This paper conducts in-depth research on the process of controlled dielectric breakdown (CDB). Exploring the different mechanisms of dielectric breakdown process of silicon nitride thin films under different electrolyte solutions. By comparing the efficiency of pore formation and noise analysis of nanopore under different experimental parameters, this paper reports a method for preparing low-noise solid-state nanopore via CDB. In addition, we verify the function of the nanopores prepared by CDB through$\lambda$-DNA translocation experiments.
Fields of Study & Subjects
Nanopore and Nanochannel Transport Studies
Silicon Nanostructures and Photoluminescence
Anodic Oxide Films and Nanostructures
Publication details
- Journal / source
- IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
- Pages
- 1609–1612
- Publication date
- 25 January 2026
- Language
- EN