A Mems Loudspeaker Based on a Polymer Membrane with Partial Stiffening, Actuated by a Thin Pzt Film

IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2026

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Authors: Romain Liechti, C. Dieppedale, Timothée Rotrou, G. Le Rhun
DOI: 10.1109/mems64181.2026.11419499
Cited by: 0
References: 6

Abstract

This work reports a polymer-based MEMS loudspeaker with a partially stiffened membrane actuated by a thin PZT film. An innovative PZT layer transfer process is used to integrate high-performance piezoelectric material with a polymer substrate, addressing the thermal incompatibility between PZT crystallization and polymers. The combination of a compliant polymer, local stiffening, and high-quality PZT thin films allows the fabrication of functional MEMS loudspeakers with reproducible performance.

Fields of Study & Subjects

Advanced MEMS and NEMS Technologies Dielectric materials and actuators Ferroelectric and Piezoelectric Materials

Publication details

Journal / source
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
778–781
Publication date
25 January 2026
Language
EN