Electrostatic MEMS Mirror-Based 1D Rotational Scanning for High-Precision 2D Eye Tracking

Eye tracking technology has broad applications, yet conventional camera-based approaches remain constrained by an inherent trade-off between accuracy and power consumption. To overcome this limitation, we proposed a novel eye tracking method based on a dual-axis 8 kHz driven electrostatic Micro Electromechanical System (MEMS) mirror. The method enables flexible onedimensional (1D) rotational scanning through duty-cycle and phase adjustment of the drive signal, directing the laser beam precisely to the cornea. Gaze direction is estimated from the time interval of the corneal reflection signal, minimizing power consumption. Experimental evaluation confirmed stable performance during simulated saccades, achieving angular accuracy better than 0.5° with low latency. The work establishes a pathway toward compact and energy-efficient eye tracking systems.