Piezoelectric Micromirror Using Integrated Resonant Sensors with Temperature Compensation Function

This paper reports a piezoelectric micromirror using integrated resonant sensors with temperature compensation function for the first time in this field. The proposed piezoelectric micromirror with two integrated resonators used for angle sensing and reference are successfully operated simultaneously in experiment. The results show that the temperature fluctuation to the angle sensing could be reduced by more than 3 times based on this mechanism, which will open the new piezoelectric micromirror with very low frequency angle sensing capability with higher temperature fluctuation robustness on simplified fabrication process.