The Interdimensional Error for Quartz Crystal Resonator Force Sensor for Multiaxis Use

The quantitative analysis of the interdimensional error on the quartz crystal resonator (QCR) force sensor suggested that the high dynamic force sensing could be possible even for multi-axis use. We designed a QCR that is suitable to paste on the parallel link strain body. Due to the material anisotropy and the sensitivity to the strain tensors, QCR force sensor exhibits a certain frequency error against the omnidirectional force. The FEM analysis showed the theoretical frequency shift and deviation from the ideal output. The experimental characterization also exhibited consistent error distribution. The worst error was$6.76 \text{Hz} / 18.6 \mu \mathrm{N}$, which is quite smaller than that of the commercial multi-axis force sensor.