Low-$\mathrm{V}_{\pi} \cdot \mathrm{L}$ Acousto-Optic Modulators in Silicon Loaded Scandium Aluminum Nitride on Sapphire

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Authors: Jack Guida, Siddhartha Ghosh
Cited by: 0
References: 14

Abstract

This work presents the implementation and characterization of resonant surface acoustic wave (SAW)based acousto-optic modulators in silicon (Si)-loaded 30% scandium aluminum nitride (ScAlN) on sapphire (SoS), advancing an integrated photonics platform for low-$\mathrm{V}_{\pi}$modulation. Exploiting the index-of-refraction contrast between silicon and scandium aluminum nitride with the low-index sapphire yields robust mode guidance within the heterostructure, ensuring efficient optical mode confinement. Together with the high electromechanical coupling$\left(k_{t}{}^{2}\right)$of SoS, SAW resonators generate high strain to modulate the effective refractive index, enabling resonant acousto-optic modulation. Fabricated modulators in this platform achieve a measured$\mathrm{V}_{\pi} \cdot \mathrm{L}$of$3.60 \mathrm{V} \cdot \text{cm}$, highlighting its potential for integrable, high-performance optomechanical devices.

Fields of Study & Subjects

Acoustic Wave Resonator Technologies Optical and Acousto-Optic Technologies Mechanical and Optical Resonators

Publication details

Journal / source
IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages
179–182
Publication date
25 January 2026
Language
EN