A GaN-Based All-Solid-State Impedance-Matched Marx Generator With High Repetition Rates

In this paper, a novel all-solid-state impedance-matched Marx generator (IMG) is proposed that offers fast recharge times and, thus, high repetition rates with little impact on the output rise time. The topology consists of an inverted buck converter combined with a Marx generator. The proposed topology is primarily suitable for the generation of pulses with short pulse widths (e.g., 100 ns to 500 ns) and high repetition rates (e.g., higher than 1 kHz). Previous studies have shown that, for certain applications, such as air purification, shorter pulse rise times result in higher yields. Therefore, the proposed generator is optimized for a short output rise time through accurate stage timing and the utilization of an impedance-matched layout. Finally, a prototype capable of generating 4.65 kV, 95A pulses has been realized to validate the proposed topology. Results show that the generator can achieve a 10 kHz repetition rate when generating 100 ns full-load output pulses with an output voltage rise time of 8.57 ns. In addition, two iterations of the proposed IMG have been built to further improve the output rise time and enhance robustness against electromagnetic interference (EMI).