Stress-Tuned Electrostatic Frequency Combs in PDMS-Based Flexible MEMS Device
Fields of Study & Subjects
Advanced MEMS and NEMS Technologies
Mechanical and Optical Resonators
Geophysics and Sensor Technology
Publication details
- Journal / source
- 2026 IEEE 23rd International Multi-Conference on Systems, Signals & Devices (SSD)
- Publisher
- IEEE
- Pages
- 1342–1347
- Publication date
- 30 March 2026