Development of High Detection Efficiency Titanium Transition-Edge Sensors for 1550 nm Single-Photon Detection

IEEE Transactions on Applied Superconductivity 2026 Open access

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Authors: Xiaolong Xu, Peizhan Li, Carlo Pepe, J. Chen, Jinjin Li, Wen Zhang, M. Rajteri, G. Brida, Huifang Gao, Fei Li, Zheng Liu, Ying Gao
+1 more Xueshen Wang
DOI: 10.1109/tasc.2025.3649410
Cited by: 2
References: 23

Abstract

Transition-edge sensors (TESs) have shown the capability of both energy resolution and resolving photon numbers. In this work, we present the fabrication and characterization of high detection efficiency Ti optical TESs with the critical temperatureTc= 213 mK and the photon-number resolving capability at telecommunication wavelength 1550 nm. The Ti superconducting film is prepared by a DC magnetron sputtering technique. An optical cavity comprised of 5-layers antireflection and 15-layers high-reflection Ta2O5/SiO2is enclosed with the Ti film by an ion beam assisted deposition method to improve detection efficiency, which brings the absorption of 99.74%. The energy resolution for the Ti TES with sensitive area 20 μm × 20 μm is 0.45 eV and the detection efficiency is 97% ± 1%.

Fields of Study & Subjects

Superconducting and THz Device Technology Atomic and Subatomic Physics Research Magneto-Optical Properties and Applications

Publication details

Journal / source
IEEE Transactions on Applied Superconductivity
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
36
Issue
5
Pages
1–4
Publication date
12 January 2026
Language
EN