Design, Electromagnetic–Mechanical Modeling, and Evaluation of a Normal-Stressed Electromagnetic Dual-Axis Nanopositioning Stage
Fields of Study & Subjects
Piezoelectric Actuators and Control
Metal and Thin Film Mechanics
Microstructure and mechanical properties
Publication details
- Journal / source
- IEEE Transactions on Automation Science and Engineering
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 23
- Pages
- 8685–8696
- Publication date
- 1 January 2026