Research on Electromagnetic Driving Characteristics of MEMS Coil Considering Geometric Parameters of Cross Sections

To investigate the electromagnetic drive characteristics of micro-electromechanical system (MEMS) coils used in fuze safety and arming device (SAD). The cross-sectional geometric parameters of MEMS coils are analyzed in this article. A theoretical model of MEMS coils considering cross-sectional geometric parameters was established, and the relationship between the interaction force between MEMS coils and permanent magnets was analyzed. The electromagnetic characteristics of coils were analyzed based on the requirements of the SAD which guided the optimized design of the MEMS coils. The improved genetic algorithm nondominated sorting genetic algorithm II (NSGA-II) was employed for the multiobjective optimization of the coil’s magnetic flux density$B$, current density$J$, and power$P$. The key structural parameters of the coil that meet the requirements of the SAD have been determined. Finally, the optimized MEMS coils were fabricated and subjected to the tests of overload resistance capability and micro-electromagnetic force. The results indicate that the prototype exhibits excellent overload resistance capability, with no significant damage or functional failure observed. Furthermore, the micro-electromagnetic force values align well with theoretical calculations. Meanwhile, the test results of microelectromagnetic forces align well with numerical calculations, demonstrating the necessity and of MEMS coil modeling that accounts for cross-sectional geometric parameters.