Effects of Size Scaling on Reliability Issues of 3-D Trench Hf 0.5 Zr 0.5 O 2 Capacitor: Polarization Switching Kinetics Analysis and TCAD Simulation
Abstract
In this work, we present a systematic study of size scaling effects on the reliability issues of Hf0.5Zr0.5O2(HZO) ferroelectric 3-D trench capacitor. First, based on the deep analysis of polarization switching kinetics, we find that with size scaling, the distribution of polarization switching becomes increasingly dispersed. Moreover, by characterizing defect density and simulating electric field profiles, we reveal that the electric field distribution becomes increasingly discrete with size scaling, which is attributed to the unique trench structure. Furthermore, possible solutions to suppress these effects are proposed, which will offer key guidelines for enhancing the reliability of 3-D trench capacitor.
Fields of Study & Subjects
Ferroelectric and Negative Capacitance Devices
Advanced Memory and Neural Computing
Ferroelectric and Piezoelectric Materials
Publication details
- Journal / source
- IEEE Transactions on Electron Devices
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 73
- Issue
- 5
- Pages
- 2735–2739
- Publication date
- 1 April 2026