Ku-Band SMR-BAW Resonators With Improved Thermal Stability Utilizing Periodically Poled AlN Piezoelectric Layers

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Authors: Ruidong Qin, Chen Li, Chongyang Huo, Wentong Dou, XJ Huang, Zhiqiang Mu, Wenjie Yu
Cited by: 1
References: 40

Fields of Study & Subjects

Acoustic Wave Resonator Technologies GaN-based semiconductor devices and materials Ferroelectric and Piezoelectric Materials

Publication details

Journal / source
IEEE Transactions on Electron Devices
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Volume
73
Issue
6
Pages
3606–3612
Publication date
1 May 2026