Ku-Band SMR-BAW Resonators With Improved Thermal Stability Utilizing Periodically Poled AlN Piezoelectric Layers
Fields of Study & Subjects
Acoustic Wave Resonator Technologies
GaN-based semiconductor devices and materials
Ferroelectric and Piezoelectric Materials
Publication details
- Journal / source
- IEEE Transactions on Electron Devices
- Publisher
- Institute of Electrical and Electronics Engineers (IEEE)
- Volume
- 73
- Issue
- 6
- Pages
- 3606–3612
- Publication date
- 1 May 2026