Totally Mass and Interference Decoupling in Dual-Stage Nanopositioning: A Novel High-Speed Parallel-Actuation Strategy

Dual-stage nanopositioning systems are highly appealing for nanomanipulation owing to their large range, high speed, and high accuracy. In this article, a novel parallel-actuation dual-stage nanopositioning strategy (PDNS) is proposed to enhance the high-speed tracking performance by avoiding the inherent issues of series-actuation and improving the current parallel-actuation schemes. First, the issues of current dual-stage nanopositioning schemes in high-speed tracking are analyzed, followed by the conceptual presentation of PDNS. Next, for implementation of PDNS, the mechanical design and modeling of a nanopositioner are demonstrated. To achieve high-speed tracking controls, a complementary filter-based dual-stage controller is developed. Then, the designed parameters are simultaneously optimized by a new integrated mechanical-control codesign method, considering the mechanical and control specifications together. Finally, a series of experiments have been successfully conducted to validate the effectiveness of proposed PDNS. The results indicate that the lumped mass and interference behavior in dual-stage system have been decoupled by 99.09% and 99.33%, respectively. Furthermore, the proposed method improves the tracking accuracy of triangular trajectories by 27.96% at 5 Hz and 42.47% at 100 Hz, compared to series-actuation scheme. All the results uniformly confirm that the proposed PDNS has effectively enhanced the high-speed tracking performance of dual-stage nanopositioning system.