Automated and Near-Flawless Micropipette PIH Assembly to MEMS Nanoforce Sensor With A Robotic Microscopy System

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Authors: Wendi Gao, Yi Yang, Wenji Cui, Yang Lv, Libo Zhao, Zhuangde Jiang, Dong Sun
Cited by: 1

Fields of Study & Subjects

Force Microscopy Techniques and Applications Nanofabrication and Lithography Techniques Advanced MEMS and NEMS Technologies

Publication details

Journal / source
IEEE Transactions on Industrial Electronics
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Pages
1–13
Publication date
1 January 2026