Linear-Complexity Pixelated Absolute Testing Using Iteration for Laser Fizeau Interferometry

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Authors: Guoqing Sheng, Duo Li, Xinquan Zhang, Zhe Zhang, Xi Wang, Yijun Shen, Xiaoyue Qiao, Rong Su, Mingjun Ren
Cited by: 0
References: 23

Abstract

Absolute testing separates the reference surface error from the test surface error in Fizeau interferometry. To resolve high-spatial-frequency components in absolute surface errors at pixel-level resolution, a pixelated modeling approach is required to separate form errors. Conventional pixelated absolute testing, however, suffers from computational bottlenecks due to large-scale data processing. To address this limitation, we propose a Linear-Complexity Pixelated (LCP) method for absolute testing through iterative processes. It establishes an absolute testing model by rotating and translating the test surface. The reference surface's form error is then computed with linear complexity via iteration. Simulations compare the proposed method with two alternative absolute testing methods. The results demonstrate significantly reduced computational complexity with high resolution at the pixel level. Experimental validation using flat and spherical reference mirrors confirms the method's capability to decouple surface errors containing mid-to-high spatial frequency components, including mounting-induced edge artifacts and localized defect signatures, demonstrating its superior absolute testing performance compared to the Zernike-fitting method.

Fields of Study & Subjects

Optical measurement and interference techniques Surface Roughness and Optical Measurements Advanced Measurement and Metrology Techniques

Publication details

Journal / source
IEEE Transactions on Instrumentation and Measurement
Volume
75
Pages
1–8
Publication date
1 January 2026