Temperature, Pressure, and Strain Metamaterial Sensor Based on High-Temperature Co-Fired Ceramic for Extreme Environment

High-temperature co-fired ceramics (HTCC) exhibit great potential for sensing and monitoring applications in extreme environments. This paper presents an integrated metamaterial sensor utilizing a HTCC substrate, capable of real-time measurement of harsh environment conditions by tracking the resonance frequencies between the antenna and the sensor. A multi-resonance design was developed, featuring three distinct resonance frequencies ranging from 7 GHz to 9 GHz, allowing for the separate monitoring of temperature, pressure, and strain. The temperature-pressure-strain (TPS) sensor was shown to operate steadily between 25-1200 °C, 0-700kPa and -400 to +400με. Utilizing metamaterial technology, the sensor offers high stability, compact dimensions, which provides a reliable solution for improving the robustness of direct environmental monitoring of industrial systems in extreme environments.