3-D-Array SiC X-Ray Detector With High Sensitivity and Ultralow Detection Limit

In this article, we report the fabrication and comparative evaluation of three-dimensional (3D) array and planar 4H-SiC X-ray detectors, both designed with identical active-layer thickness and area. The 3D-array detector demonstrates significantly enhanced performance, achieving a high sensitivity of 11.52×104μC∙Gyair-1· cm-2and an ultralow detection limit of 0.15 nGyair·s-1with a current gain of 2.54×104at 200 V. The 3D-array detector also exhibits stable, repeatable transient responses and superior charge collection efficiency, attributed to the shortened carrier drift paths and improved electric field uniformity introduced by the through-hole electrodes. These results underscore that SiC-based 3D-array detector uniquely combines a large sensitive volume with high charge collection efficiency, making them well suited for wide area X-ray sensing in radiation-intensive environments.