Doping modulation and interface engineering of GaN toward power device applications

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Authors: Xiaojie Ren, Jinfeng Gao, Shihang Liu, Lin Li, Zhenghai Xie, Shuangzan Lu, Bo Zhao, Hanxiang Jia
Cited by: 0
References: 80

Abstract

This review focuses on gallium nitride (GaN) semiconductor materials, systematically discussing the latest research progress in doping modulation, interface engineering, and their applications in power devices. First, the article analyzes the mechanisms through which donor-type (e.g., Si) and acceptor-type (e.g., Mg) doping influence the electrical properties and piezoelectric characteristics of GaN, summarizing the regulatory effects of doping strategies on carrier concentration, mobility, and material stability. Second, it highlights the interfacial behavior and the formation principles of two-dimensional electron gas in AlGaN/GaN heterostructures, reviewing the contributions of interface passivation, interlayer optimization, and stress management to enhancing device dynamic characteristics and reliability. Finally, the review provides an in-depth analysis of the current applications of GaN-based high-electron-mobility transistors and power diodes in fields such as high-efficiency power conversion and high-frequency power switching, while also envisioning their future prospects in next-generation energy Internet and electric driving. This paper aims to offer a systematic reference for the material design and performance optimization of GaN-based power devices.

Fields of Study & Subjects

GaN-based semiconductor devices and materials Silicon Carbide Semiconductor Technologies Ga2O3 and related materials

Publication details

Journal / source
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Volume
44
Issue
2
Publication date
11 February 2026
Language
EN