Optimization of turbomolecular pump blade structure based on generative adversarial network

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Authors: Xiaohong Wang, X. Lei, Z. Ge, Bing Han, Xiaohong Wang
Cited by: 0
References: 22

Abstract

Turbomolecular pumps are vital in high-vacuum applications, including semiconductor manufacturing and nuclear physics. While traditional straight blades are limited in performance, curved-blade designs offer enhanced efficiency but pose optimization challenges. This study presents a deep learning-based approach using Generative Adversarial Networks (GANs) to design three-dimensional curved-blade geometries with a straight blade as input. To overcome the lack of available vast amounts of training data in conventional GAN network training, a new training process is implemented via COMSOL simulations, which is used to analyze gas particle transmission and to give an evaluation of design output. Simulation results demonstrate that the curved-blade configurations significantly improve pumping performance, a 5.08% improvement in the maximum pumping speed coefficient and a 16.3% increase in the maximum compression ratio, compared to conventional straight designs. This work establishes a data-driven optimization framework for pump blade design and proposes a training methodology without large training data, highlighting the potential of machine learning in advancing vacuum technology. The methodology provides a scalable solution for complex aerodynamic structures, providing novel approaches for the optimized design of high-speed turbomolecular pumps.

Fields of Study & Subjects

Turbomachinery Performance and Optimization Gas Dynamics and Kinetic Theory Generative Adversarial Networks and Image Synthesis

Publication details

Journal / source
Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena
Volume
44
Issue
1
Publication date
1 January 2026
Language
EN