Effective medium approximation for the refractive index of stratified metal oxide composites synthesized by atomic layer deposition

View at publisher
Authors: Joseph Joel Muhanga, Robert H. Coridan
Cited by: 0
References: 34

Abstract

Atomic layer deposition (ALD) is a unique method for synthesizing conformal layers with precise composition. It is particularly useful for the synthesis of mixed metal oxides for functional materials. One application of interest is the use of ALD for tailoring the refractive index of coatings. In homogeneously distributed composites of metal oxides, the refractive properties can be approximated as the average of the indices of the components. This is known as an effective medium approximation (EMA) and can be used to design the macroscopic properties of composites. ALD produces layered, anisotropic films, so the validity of an EMA in describing these films is not clear. Here, we use optical simulations and experimental characterization of stratified composites of TiO2 and Al2O3 to study the application of an EMA to the transmission and reflection behavior of ALD-prepared mixed metal oxide thin films. We found that when the characteristic layer thickness is smaller than roughly 10 nm, the optical spectra of theoretical and experimental ALD films match the equivalent theoretical spectra for a material with a refractive index calculated from a simple, compositionally weighted EMA. Hence, this EMA could describe the transmission and reflectance spectra in ALD-derived TiO2–Al2O3 nanolaminates when the films were sufficiently stratified even without thorough characterization of the real layers in the films. As a result, we demonstrated that ALD can be used to prepare effectively homogenous mixed metal oxide films with a predictable, tailorable refractive index of any value between those of the TiO2 and Al2O3 component materials.

Fields of Study & Subjects

Optical Coatings and Gratings Semiconductor materials and devices Transition Metal Oxide Nanomaterials

Publication details

Journal / source
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films
Volume
44
Issue
2
Publication date
26 February 2026
Language
EN