Deep-learning-based phase measuring deflectometry for rapid measurement of specular components

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Authors: Peng Luo, Yan Guo, Lei Li, Qing Guo
Cited by: 0

Abstract

High-precision three-dimensional measurement of specular components plays a critical role in precision manufacturing and defect detection. However, due to their high reflectivity and the time-consuming nature of data acquisition and processing, achieving fast and real-time measurement remains a challenge. To address this issue, we propose a phase measuring deflectometry method based on a deep learning framework, which enables single-frame phase unwrapping. Specifically, a cross-attention skip connection is introduced into the TransUNet architecture to selectively fuse encoder and decoder features. In terms of the loss function, a combination of binary cross-entropy, Dice loss, and deep supervision is adopted. The model ultimately regresses the wrapped phase components M and D. Both qualitative and quantitative experiments validate that the proposed method not only improves performance metrics and phase reconstruction accuracy but also significantly reduces error while maintaining real-time inference efficiency. Moreover, the method demonstrates strong applicability not only to highly reflective specular objects but also to low-reflectivity targets for phase unwrapping inference.

Fields of Study & Subjects

Optical measurement and interference techniques Synthetic Aperture Radar (SAR) Applications and Techniques Optical Polarization and Ellipsometry

Publication details

Journal / source
Optical Engineering
Volume
65
Issue
01
Pages
1–9
Publication date
2 January 2026